鐧�(f膩)鍏変簩妤甸珨(
鑷�311鏍哥伣(z膩i)鍚庯紝鏃ユ湰娑堣不鑰呯偤绡�(ji茅)鑳斤紝澶ч噺閲囪臣
鐒惰�岋紝鐩墠鍟嗗搧鍖栫殑姘寲閹�(GaN)鍗婂皫(d菐o)楂斿厜闆诲厓浠剁殕浠ヨ棈(l谩n)瀵剁煶(Sapphire)鑸囩⒊鍖栫(SiC)鍩烘澘鐐轰富锛岀偤鑳藉彇浠ｇ従(xi脿n)鏈夌収鏄庣敘(ch菐n)鍝侊紝鏁堢巼鍙婃垚鏈槸鍚勫寤犲晢鎴姏鐨勭洰妯�(bi膩o)锛屼篃鍥犳锛岃繎骞翠締GaN on Si鎸惧付钁楀ぇ灏哄浣庢垚鏈劒(y艒u)鍕紝閫愭鎸戞埌(zh脿n)GaN on Sapphire鐨勫湴浣�;鍙︿竴鏂归潰锛孏aN on GaN鍓囨尵甯惰憲楂樻晥鑳藉強鍙ぇ闆绘祦鎿嶄綔鐨勫劒(y艒u)鍕紝閫愭宥勯湶闋銆傜従(xi脿n)闅庢缇庡湅Sorra鏇村凡鎺ㄥ嚭浠-plane GaN鍩烘澘鐐轰富鐨勫晢鍝侊紝鏈締锛岀祼(ji茅)鍚堟暣楂擥aN on GaN鐨勫劒(y艒u)榛炲啀鎼厤鍩烘澘鎴愭湰鐨勪笅闄嶏紝闋�(y霉)鏈�2015骞村皣鏈夋鏈冨彇浠ED鐓ф槑鏂规銆�
鍙楁儬浜庢妧琛�(sh霉)涓婄殑绐佺牬锛屾爱鍖栭幍宸叉湁闈炲父澶氱殑鏅跺悜闈㈠彲鍋氱偤
涓嶅彈鏅舵牸甯告暩(sh霉)涓嶅尮閰嶅奖闊裤��GaN on GaN鏁堢巼绌�(w臎n)瀹�
鐩墠姘寲閹电郴鍒楃殑鐧�(f膩)鍏夊堡浠ユ爱鍖栭幍鍜屾爱鍖栭姦閹�(InGaN)鏉愭枡鐐轰富锛屾绋櫦(f膩)鍏変簩妤甸珨鍥犵己涔忚垏鍩烘澘鏅舵牸鍖归厤鐨勫熀鏉匡紝涓�鑸殕灏囨鏉愭枡纾婃櫠鎴愰暦(Epitaxial Growth)浜庤棈(l谩n)瀵剁煶鍩烘澘涓娿��
鐒惰�岋紝鐢变簬鐣拌唱(zh矛)纾婃櫠鎴愰暦涔嬭杽鑶滃拰鍩烘澘涔嬮枔鍥犳櫠鏍煎父鏁�(sh霉)褰兼涓嶅尮閰嶏紝鑰岄�犳垚姘寲鐗╄杽鑶滀腑鐢�(ch菐n)鐢熸サ楂樼殑缂洪櫡瀵嗗害(绱�109~1010cm-2)锛岄��(j矛n)涓�姝ュ皫(d菐o)鑷碙ED鐧�(f膩)鍏夋晥鐜囦笅闄嶏紝鍦�1(a)~ (c)鍒嗗垾鐐鸿棈(l谩n)鍏塋ED鐧�(f膩)鍏夊堡鎴愰暦浜庤棈(l谩n)瀵剁煶鍩烘澘鑸囨爱鍖栭幍鍩烘澘涔婣FM閲忔脯鍦栵紝鍏堕噺瀛愪簳鍘氬害鍒嗗垾鐐�2.7濂堢背銆�6濂堢背鍜�15濂堢背锛屽彲鐧�(f膩)鐝�(xi脿n)鍒扮櫦(f膩)鍏夊堡鎴愰暦鍦ㄨ棈(l谩n)瀵剁煶鍩烘澘涓婂瓨鍦ㄨ憲瑷卞鐨勭己闄凤紝闅ㄨ憲鐧�(f膩)鍏夊堡鍘氬害閫愭几澧炲帤锛屾礊鐨勫昂瀵搁�愭几璁婂ぇ銆�
鍦�1 涓嶅悓钘�(l谩n)鍏夌櫦(f膩)鍏変簩妤甸珨涔嬮噺瀛愪簳鍘氬害(a) 2.7nm銆�(b) 6.0nm銆�(c)15.0nm涔嬫垚闀峰湪钘�(l谩n)瀵剁煶鍜屾爱鍖栭幍鍩烘澘涔婣FM鍦�
鍙嶈鍦ㄦ爱鍖栭幍鍩烘澘涓婏紝鐩＄鍘氬害閬�(d谩)鍒�15濂堢背鍏惰〃闈粛鐒＄己闄峰瓨鍦紝鍦�2鐐篏aNon GaN鐧�(f膩)鍏夊堡TEM鍓栭潰閲忔脯鍦栵紝閲忓瓙浜曞帤搴︾偤15濂堢背涓嬶紝鍏堕噺瀛愪簳鑸囬噺瀛愯兘闅滈枔涔嬫帴闈粛闈炲父骞虫暣锛岀櫦(f膩)鍏夊堡鏈夌浉鐣�(d膩ng)濂界殑鍝佽唱(zh矛)锛屽緸XRD鍒嗘瀽绻炲皠宄版尝灏嶄簬鍗婃尝楂樺鐨勬暩(sh霉)鍊兼洿鍙及绠楀嚭閲忓瓙浜曟帴闈㈣檿鐨勭矖绯欏害锛屽湪GaN on GaN涓婂彧鏈夊ぇ绱�8%锛岃�孏aN on Sapphire鐐�46.0%(鍦�3)銆�
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鍦�2 钘�(l谩n)鍏夌櫦(f膩)鍏変簩妤甸珨鎴愰暦鍦ㄦ爱鍖栭幍鍩烘澘涔嬬櫦(f膩)鍏夊堡TEM鍓栭潰鍦�
鍦�3 (0002)闈箣MQW on钘�(l谩n)瀵剁煶鍜孏aN鍩烘澘涔媂RD鍒嗘瀽鍦�
鎺ヨ憲锛屽埗浣�15瀵嗙埦(mil)脳15瀵嗙埦鍌崇当(t菕ng)mesa-type鍏冧欢锛屽湪200姣畨鍩�(mA)闆绘祦閲忔脯涓�(鍦�4)锛岀暥(d膩ng)GaN on Sapphire涔嬮噺瀛愪簳鍘氬害瓒呴亷6濂堢背锛孡ED鏁堣兘涓嬮檷鐨勯潪甯稿揩锛岃�孏aN on GaN LED鍍呬簺寰笅闄嶏紝閫欎唬琛ㄨ憲鍙互鍒╃敤鍘氱殑閲忓瓙浜曠祼(ji茅)妲�(g貌u)渚嗘彁鍗囬噺瀛愪簳閲岀殑鍠綅杓夊瓙瀵嗗害锛屾湁鍔╀簬闄嶄綆Auger鏁堟噳(y墨ng)锛屾彁鍗囧ぇ闆绘祦涓嬬殑LED鏁堣兘銆傚啀鑰咃紝寰炰笉鍚岀櫦(f膩)鍏夊堡灏嶆暩(sh霉)鎼厤涓嶅悓閲忓瓙浜曞帤搴﹀椹椾腑锛屼害鍙櫦(f膩)鐝�(xi脿n)姝ょ従(xi脿n)璞�(鍦�5)锛屽GaN on Sapphire鐨勭附閲忓瓙浜曞帤搴﹀瓨鍦ㄤ竴涓婇檺鍊硷紝鐣�(d膩ng)瓒呴亷姝ゆ暩(sh霉)鍊兼檪LED鏁堢巼灏囨渻涓嬮檷锛屽弽瑙�GaN on GaN鏁堣兘浠嶅彲浠ョ董鎸佷竴瀹氬�间箣鏁堢巼銆�
鍦�4 涓嶅悓閲忓瓙浜曞帤搴︿簬钘�(l谩n)瀵剁煶鍜孏aN鍩烘澘涓婁箣LED鏁堢巼鍦�
鍦�5 涓嶅悓閲忓瓙浜曚箣灏嶆暩(sh霉)鍜屽帤搴︿簬钘�(l谩n)瀵剁煶鍜孏aN鍩烘澘涓婁箣LED鏁堣兘鍦�
灞悓璩�(zh矛)鐢熺敘(ch菐n)鏉愭枡銆�GaN on GaN閬垮厤妤靛寲鍫存晥鎳�(y墨ng)
鍌崇当(t菕ng)GaN on Sapphire闄ゆ櫠鏍间笉鍖归厤鎵�閫犳垚鐨勭己闄蜂互澶栵紝閭勫瓨鍦ㄨ憲鏅舵牸涓嶅尮閰嶆墍寮曡捣鐨勬サ鍖栧牬鏁堟噳(y墨ng)锛屽弽瑙�GaN on GaN鏄爆浜庡悓璩�(zh矛)鎴愰暦鐨勬潗鏂欙紝鍙檷浣庢櫠鏍煎父鏁�(sh霉)涓嶅尮閰嶆墍寮曡捣鐨勬サ鍖栧牬鏁堟噳(y墨ng)锛屾敼鍠勯噺瀛愭晥鐜囦笅闄嶄箣鍟忛锛屽湒6鍙櫦(f膩)鐝�(xi脿n)鍒扮敓闀稧aN on Sapphire鍜孏aN on GaN涓婄殑E2(High)涔嬪�煎湪569.52濂堢背鍜�567.16濂堢背锛屽叾涓璆aN on Sapphire涓婅純澶х殑鏁�(sh霉)鍊兼槸鍥犵偤娈樼暀鐨勫鎳�(y墨ng)鍔涙墍閫犳垚;鑰孏aN on GaN涓婄殑鏁�(sh霉)鍊艰垏鍠磾GaN鍩烘澘鐩稿悓锛屼唬琛ㄨ憲骞剁劇鎳�(y墨ng)鍔涘瓨鍦℅aN纾婃櫠钖勮啘閲屻��
鍦�6 鎷夋浖鍒嗘瀽鍦�
鍦�7鐐烘尝闀峰皪浜庝笉鍚岄浕娴佹敞鍏ヤ箣鏇茬窔鍦栵紝鐣�(d膩ng)娉ㄥ叆闆绘祦澧炲姞鏅傚�欐渻閫犳垚閬斀鏁堟噳(y墨ng)(S
鍦�7 涓嶅悓闆绘祦涓嬩箣EL娉㈤暦浣嶇Щ閲忔脯鍦�
鍦�8 闆诲瓙闆绘祦瀵嗗害妯℃摤鏇茬窔鍦�
鍦�9鐐虹浉灏嶅閮ㄩ噺瀛愭晥鐜囧皪浜庨浕娴佹敞鍏ユ洸绶氬湒锛屽湪閫ｇ簩(x霉)闆绘祦娉ㄥ叆涓嬶紝LED on GaN鐨勫嘲鍊兼渻鍑虹従(xi脿n)鍦�20?40mA涓嬶紝涔嬪悗闅ㄨ憲闆绘祦涓婂崌鑰岄枊濮嬩笅闄�;LED on Sapphire鐨勫嘲鍊煎墖灏忎簬20mA锛岄毃钁楅浕娴佷笂鍗囪�屽揩閫熶笅闄嶃�傚湪300mA闆绘祦涓嬶紝LED on Sapphire鍜孡ED on GaN鐨勫閮ㄩ噺瀛愭晥鐜囧皪浜庡嘲鍊肩偤56%鍜�73%锛岃純澶х殑LED on GaN鐨勫嘲鍊兼槸鍥犵偤杓冧匠鐨勬潗鏂欏搧璩�(zh矛)鎵�閫犳垚;鍦�300mA闆绘祦涓嬶紝LED on GaN鏈�38%鐨勬彁鍗囨槸鍥犵偤鏉愭枡鍝佽唱(zh矛)鎻愬崌鍜岃純灏忕殑妤靛寲鍫存晥鎳�(y墨ng)鎵�閫犳垚銆�
鍦�9 LED on sapphire鍜孡ED on GaN鍦ㄩ�ｇ簩(x霉)闆绘祦鍜岃剤娌栭浕娴佷笅涔嬬浉灏嶅閮ㄩ噺瀛愭晥鐜囬噺娓湒
鑰屽湪鑴堟矕閲忔脯妯″紡涓嬶紝LEDonGaN鐨勭壒鎬у苟鐒″お澶у樊鐣帮紝鍘婚櫎鎺夌啽鏁堟噳(y墨ng)鍙彁鍗�300mA闆绘祦涓嬩箣鏁堣兘閬�(d谩)76%;鑰孡ED on Sapphire鍗诲彧鏈�12%鎻愬崌锛岄�欎篃鎰忓懗钁桳ED on Sapphire瀛樺湪杓冨毚(y谩n)閲嶇殑鐔辨晥鎳�(y墨ng)锛岀暥(d膩ng)浣跨敤鑴堟矕閲忔脯鎯呮硜涓嬶紝蹇界暐鐔辨晥鎳�(y墨ng)鐨勫奖闊垮洜姝ゆ彁鍗嘗ED on Sapphire涔嬫晥鐜囷紝閫欎篃浠ｈ〃钁桮aN鍩烘澘鏈韩闄や簡楂樺搧璩�(zh矛)鍜屽悓璩�(zh矛)鎴愰暦涔嬪劒(y艒u)榛烇紝鏇存湁楂樻暎鐔辩郴鏁�(sh霉)涔嬪劒(y艒u)榛炲彲鍦ㄥぇ闆绘祦涓嬫搷浣溿��
鍙仛鐐篘鍨嬪皫(d菐o)闆诲熀鏉裤��GaN on GaN鍒╀簬鍒朵綔鍨傜洿绲�(ji茅)妲�(g貌u)
GaN on GaN鏈夎憲妤靛ぇ鐨勫劒(y艒u)榛炲湪浜庡叾鍩烘澘鏈韩鍙偤N鍨嬪皫(d菐o)闆诲熀鏉匡紝鏈夊埄浜庡埗浣滃瀭鐩村瀷绲�(ji茅)妲�(g貌u)锛岀渷鐣ュ偝绲�(t菕ng)鍦ㄨ棈(l谩n)瀵剁煶鍩烘澘涓婂埗浣滃瀭鐩村瀷绲�(ji茅)妲�(g貌u)鏅傛墍瑕佺敤鍒扮殑闆峰皠鍓濋洟鍒剁▼锛屽彲閬垮厤鍒剁▼绻佺懀銆佹鑷烘槀璨翠笖鑹巼涓嶉珮涔嬬己榛�;鍐嶈�咃紝姘寲閹靛熀鏉胯儗闈㈢偤N-face闈紝鍙埄鐢ㄦ繒铦曞埢鍒剁▼绨″柈鍒朵綔鍑鸿閷愮祼(ji茅)妲�(g貌u)锛屼互鎻愬崌鍏夎悆鍙栫巼锛屾鍒剁▼灏嶄簬姘寲閹靛熀鏉挎晥鐜囨彁鍗囦締瑾浉鐣�(d膩ng)?sh霉)闂瑰尵顎�?/P>
鐢变簬鍩烘澘鏈韩鐨勮儗鏅懟闆滄績搴﹂棞(gu膩n)绯伙紝鍦ㄥ彲瑕嬪厜閮ㄥ垎閫忓厜鐜囩劇娉曢仈(d谩)鍒�100%锛屽姞涓婃爱鍖栭幍鏉愭枡鑸囩┖姘ｉ枔鐨勬姌灏勭郴鏁�(sh霉)宸暟锛岄�犳垚澶ч儴鍒嗙殑鍏夐兘浠ュ叏鍙嶅皠鏂瑰紡璺戝洖鏉愭枡鏈韩锛岀劇娉曟湁鏁堣悆鍙栧嚭渚嗭紝鍥犳灏囨爱鍖栭幍鍩烘澘N-face琛ㄩ潰鍒朵綔鍑哄咕浣曞湒妗堬紝灏囨湁鍔╀簬鎻愬崌LED鐧�(f膩)鍏夋晥鐜囥��
鍦�10鐐轰笉鍚岃潟鍒绘檪闁撳皪浜庢爱鍖栭幍N-face琛ㄩ潰铦曞埢鎯呭舰锛岀暥(d膩ng)铦曞埢鏅傞枔瓒婁箙鎵�閫犳垚鐨勮閷愬ぇ灏忓皣鏈冭秺澶э紝涓斿瘑搴﹁秺浣庛�傚湒11鐐哄婧獷L閲忔脯鍦栧拰闆诲鍜屾晥鐜囨洸绶氬湒锛孲T-LED鍜孯B-LED鐐轰笉浣跨敤鍜屼娇鐢ㄦ繒铦曞埢鍒剁▼涔嬫ǎ鍝侊紝LEDI鍜孡EDII鐐�405nm鍜�450nm涔嬬櫦(f膩)鍏夋尝闀凤紝鐣�(d膩ng)浣跨敤婵曡潟鍒诲埗绋嬩簬姘寲閹靛熀鏉夸笂锛屽彲鎻愬崌鍏夎悆鍙栫巼骞堕��(j矛n)涓�姝ユ彁鍗嘗ED鏁堢巼锛屾鏁堟噳(y墨ng)鍦ㄧ煭娉㈤暦鐗瑰垾鐨勯’钁楋紝鍦�20mA闆绘祦涓嬶紝杩戠传澶栧厜鍜岃棈(l谩n)鍏夋暣楂旀彁鍗囩殑骞呭害鐐�94%鍜�21%銆�
鍦�10 (a)鏈潟鍒汇�佽潟鍒汇��(b)1min銆�(c)5min銆�(d)10min銆�(e)30min鍜�(f)60min涔嬫爱鍖栭幍鍩烘澘N-face琛ㄩ潰涔婼EM閲忔脯鍦�
鍦�11 (a)瀹ゆ韩EL閲忔脯鍦栧拰(b)LED鍏夐浕鐗规�ч噺娓湒
n-pad閲戝爆鍒朵綔浜庡熀鏉裤��GaN on GaN绺煭纾婃櫠鏅傞枔
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鍦�12 LED on sapphire(宸�)鑸嘗ED on GaN(鍙�)绲�(ji茅)妲�(g貌u)绀烘剰鍦�
鐩＄GaN on GaN鎿佹湁鐩哥暥(d膩ng)澶氱殑鍎�(y艒u)榛烇紝浣嗙洰鍓嶄粛鍙楅檺浜庡熀鏉垮児鏍奸亷浜庢槀璨翠箣缂洪粸锛屽皫(d菐o)鑷寸劇娉曞ぇ閲忕殑鍟嗗搧鍖栧強澧婇珮寤犲晢鐨勯��(j矛n)鍏ラ杸妾伙紝鍥犳鏁撮珨甯傚牬鐨勫垏鍏ユ檪姗熼粸锛屽皣鍙栨焙浜庝笂娓稿熀鏉垮粻鍟嗗児鏍间笅闄嶉�熷害銆傛墍骞革紝鍙楁儬浜庡悇瀹跺熀鏉垮粻鍟嗘妧琛�(sh霉)涓婄殑绐佺牬锛岃秺渚嗚秺澶氬粻鍟嗘湁鑳藉姏鍒朵綔鍜屾彁渚涙爱鍖栭幍鍩烘澘锛孏aN on GaN鐨勬檪闁撳皣鏈冩洿鎻愭棭鐨勪締鑷ㄣ��
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