銆€銆€Photomask
銆€銆€Display 鐢㈢窔涓婁娇鐢ㄧ殑Mask 鐐哄叐绋�: Array 娈靛拰CF 娈�(TFT-LCD)鐢ㄧ殑, 浠ョ幓鐠冪偤鍩虹鏉愭枡鐨勬洕鍏塒hotomask; 鍜孉MOLED 娈典互閲戝爆鐐哄熀鏈潗鏂欑殑Shadow Mask (Open Mask & FMM)銆�
銆€銆€Photomask 涓昏鐢ㄤ簬Array 娈垫洕鍏夐’褰辩敤銆侾hotomask 涓婚珨绲愭鐐洪€忔槑鍩烘潗+閬厜鏉愭枡, 涓昏鐢ㄤ簬閫氶亷鏇濆厜銆侀’褰卞拰鍒昏潟宸ヨ棟鍒朵綔楂樼簿搴︾殑闆嗘垚闆昏矾鐢ㄣ€�
銆€銆€甯歌鐨勫熀鏉裤€侀伄鍏夋潗鏂欎互鍙婃潗鏂欑壒鎬уTable 1 鍜孴able 2 (** 璩囨枡渚嗘簮杓冭€�2008, 鍍呰兘浣滅偤鍙冭€� **)銆�
Table 1 Photomask 鍒嗛 (10) (** 璩囨枡渚嗘簮杓冭€�2008, 鍍呰兘浣滅偤鍙冭€� **)
Table 2 Photomask 甯哥敤閫忔槑鍩烘澘鍜岀‖璩伄鍏夋潗鏂� (10) (** 璩囨枡渚嗘簮杓冭€�2008, 鍍呰兘浣滅偤鍙冭€� **)
Table 3 Display 鐢� PhotoMask 涓昏鍙冩暩(3)
銆€銆€鍦―isplay 鐢熺敘涓�, 涓昏浣跨敤鐨勬槸鐭宠嫳/铇囨墦鐜荤拑+閴昏啘(Cr + CrO) 鐨凱hotomask 褰㈠紡 (Table 3) (3)銆傛牴鎿氶€忛亷鎬х殑涓嶅悓, Photomask 鍙互閫蹭竴姝ヨ鍒嗙偤Binary Mask 鍜孒alf Tone Mask (3)锛�
銆€銆€• Binary Mask: 瑭查鍨媘ask 涓婂崁鍩熷垎鐐哄叏閫忓厜鍗€鍩熷拰涓嶉€忔槑鍗€鍩熴€�
銆€銆€• Half-tone Mask: 闄ゅ幓浠ヤ笂鍏╁€嬪崁鍩熷, 瑭睲ask 涓婇倓瀛樺湪鍗婇€忔槑鍗€鍩熴€傞€氶亷鎺у埗鍗婇€忔槑鍗€鍩熺殑鍏夐€忛亷閲忓彲浠ユ帶鍒朵笅鏂筆R 鑶犲埢铦曞悗鐨勫湒妗堢殑楂樺害銆傝┎Mask 浜﹁绋辩偤Gray-Scale Mask 鍜�3D Mask (or GTM mask (10))銆�
銆€銆€鍦‵PD 鐢㈡キ涓┎Mask 鍩烘湰鏉愭枡鐐虹煶鑻辩幓鐠�, 骞堕€氶亷鍦ㄧ幓鐠冧笂鍒朵綔閲戝爆閴籆r 浣滅偤閬厜钃�(Cr 鍙噰鐢⊿puttering 鏂瑰紡鍒朵綔)銆�
銆€銆€鍦ㄤ娇鐢ㄦ檪Cr 闈㈣垏PR 鑶犳帴瑙搁€茶鏇濆厜(Mask 闁撹窛绱�10 μm)銆傚湪Display 鐢熺敘涓�, 闄ゅ幓CF 鏉垮, Photomask 鐢ㄤ締鍒朵綔涓昏鐢ㄤ簬鍒朵綔TFT 閮ㄥ垎, 濡係/D/G鏌靛拰绲曠罚灞ょ瓑銆�
銆€銆€鏍规摎DNP 鐨勮硣鏂欎締鐪�, 鐝炬湁Photomask 鍙互鍒朵綔鍒嗚鲸鐜囩偤14 nm 鑷�28 nm 绮惧害鐨勫櫒浠�(5)銆�
銆€銆€TFT 鍜孋F 鐨勭簿搴︿笉鍚�, 鎵€浠ュ皪Photomask 鐨勫搧璩鏍艰姹備篃鏈夊樊鐣�(Table 4)(10)銆�
Table 4 鏅€歍FT Mask 瑕佹眰鍝佽唱(10) (** 璩囨枡渚嗘簮杓冭€�2008, 鍍呰兘浣滅偤鍙冭€� **)
銆€銆€**a: CD 鍦栧舰灏哄绮惧害
銆€銆€**b: Pattern Centrality Accuracy 鍦栧舰灞呬腑绮惧害
銆€銆€**c: Registration 鍦栧舰浣嶇疆绮惧害
銆€銆€**d: Total Pitch TP 鍦栧舰绺介暦绮惧害
銆€銆€**e: Overlay 鍦栧舰濂楃洅绮惧害
銆€銆€Shadow Mask: Open Mask & Fine Metal Mask
銆€銆€鍦ㄥ埗浣滅櫦鍏夐儴浠舵檪, 鏍规摎鐝炬湁OLED 鐨勫伐钘�, 鍙互鍒嗗垾閲囩敤Open Mask 褰㈠紡鍜孎MM 褰㈠紡灏嶅櫒浠堕€茶鍒朵綔銆�
Fig 5 鏃殙鎳夌敤鏉愭枡鐨凮pen Mask (9)
Fig 6 鏃殙鎳夌敤鏉愭枡鐨凢ine Metal Mask(9)
銆€銆€Open Mask 鎶€琛撲富瑕佺敤浜嶢MOLED 鐨刉OLED 鐢熺敘涓€傝┎鎶€琛撶敱LG Display 涓昏, 骞朵富瑕佺敤浜庡ぇ灏哄闈㈡澘鐨勫埗閫犲拰鐢熺敘涓€傚拰FMM 宸ヨ棟鍒嗗垾灏峈GB 閫茶绮剧窗钂搁崓涓嶅悓, Open Mask 鐨勫昂瀵歌純澶�, 涓昏鐢ㄤ簬鍦╓OLED 鎶€琛撲腑HIL 鍜孒TL 绛夊叡閫氬堡鐨勫埗浣溿€�
銆€銆€FMM 鍏ㄧū鐐篎ine Metal Mask(绮剧窗閲戝爆鎺╂ā鐗�), 鍏朵富鏉愬彲浠ヤ富瑕佹槸閲戝爆鎴栭噾灞�+妯硅剛銆傚緸FMM 闁嬪瓟褰㈢媭渚嗗崁鍒�, 鏍规摎FMM 鐨勯枊瀛斿舰鐙€鐨勪笉鍚�, FMM 鍙互鍐嶉€蹭竴姝ョ窗鍒嗙偤Slot 鍨嬪拰Slit 鍨�(4)銆�
Fig 7 FMM 绱板垎
Fig L8 Toppan Slot Type & Slit Type of FMM(4)
銆€銆€鐢熺敘FMM 鐨勬柟寮忎富瑕佹湁涓夌ó(1): 铦曞埢銆侀浕閼�(Electroforming Metal)鍜屽閲嶆潗鏂�(閲戝爆+妯硅剛鏉愭枡)寰╁悎銆�
銆€銆€• 铦曞埢娉曞彲浠ヨ€冩叜鐐哄仛娓涙硶, 涓昏鏄€氶亷铦曞埢Invar Sheet 鐨勬柟寮忓埗浣溿€傜従闅庢涓昏鐨凮LED 闈㈡澘FMM 渚涙噳鍟�, 濡傚ぇ鏃ユ湰鍗板埛(DaiNippon Printing)銆佸嚫鐗堝嵃鍒�(TOPPAN)鍜岄仈閬嬬瓑鍧囬噰鐢ㄨ潟鍒绘妧琛撱€傝┎鏂规硶鍒朵綔鍑虹殑FMM 鍦ㄧ従闅庢鏈€钖勫彲浠ュ仛鍒�20 μm 宸﹀彸骞堕仈鍒癢QHD 绱氬垾鍒嗚鲸鐜囥€�
銆€銆€WQHD 绱氬垾鍒嗚鲸鐜嘑MM 鍦ㄧ従闅庢鐢盌NP, 骞跺凡鍑鸿波绲amsung Display 涓旈€氶亷浜嗛噺鐢㈢殑椹楄瓑銆�
銆€銆€鍦ㄨ┎鏂规硶鐢㈠嚭鐨凢MM 涔熷凡缍撻€氶亷涓夋槦閲忕敘鐨勮獚璀夈€傚湪2017 骞寸祼鏉熻垏Samsung Display 澹熸柗鎬у悎绱勫悗(鎻愪緵10~20 μm 鍘氱殑FMM), DNP 宸茬稉鑸嘊OE 閬旀垚鍗旇, 骞舵渻閫愭鍚態OE 鎻愪緵WQHD 绱氭墜姗熺敤FMM(绱�30 μm 鍘�)(7)銆�
銆€銆€• 闆婚憚(Electroforming Metal)鍙互瑕栫偤鍋氬姞娉曘€傞€氶亷瑭叉柟娉曞埗浣滃嚭鐨凢MM 鍘氬害寰堣杽銆傞噰鐢ㄨ┎鏂规硶鐨勫粻瀹朵富瑕佹湁鏃ユ湰Athene 鑸嘓itachi Maxell銆傞€欏叐瀹跺叕鍙稿凡缍撳皣鏉垮帤鎺у埗鍒扮磩5 μm, 骞舵鍦ㄧ爺鐧糤QHD 鍒嗚鲸鐜囩礆鍒ョ殑FMM 鐢㈠搧(1)銆�
銆€銆€• 澶氶噸鏉愭枡寰╁悎娉曚富瑕侀噰鐢ㄦü鑴傚拰閲戝爆鏉愭枡娣峰悎浠ュ埗浣淔MM 浠ユ噳灏嶇啽鑶ㄨ劰, V-Technology 鐩墠鍏锋湁鍋氬埌鍘氬害鐐�5μm, 涓旀垚鑶滅簿搴︿綅缃偤2 μm FMM 鐨勮兘鍔�(鍚�1 μm 鐧煎睍)(1)銆�
銆€銆€闆栫劧Hitachi Maxell 鑸嘨-Technology 鍒嗗垾閲囩敤闆婚憚鍜屽閲嶆潗鏂欏京鍚堟柟寮忓皪QHD 鍒嗚鲸鐜囦互涓婄殑FMM 鏈夐€茶鐮旂┒, 浣嗘槸鍏剁敘鍝侀倓鏈€插叆閲忕敘鍜屽粻鍟嗛璀夐殠娈点€�
銆€銆€Display 鐢熺敘涓富瑕侀噰鐢ㄧ殑FMM 鐢熺敘鎶€琛撻倓鏄互铦曞埢鐐轰富銆傝┎鎶€琛撲富瑕佺敱Samsung Display 涓诲皫骞剁敤浜庝腑灏忓昂瀵哥殑AMOLED 鍒堕€犱腑銆�
銆€銆€FMM 鐢㈡キ閺堜富瑕佺敱:
銆€銆€• 鍘熸潗鏂欎緵鎳夊晢銆�
銆€銆€• FMM 鍔犲伐鍟嗐€�
銆€銆€• 鏈€绲傜敤鎴躲€�
銆€銆€涓夎€呯祫鎴愩€�
Table 5 FMM Value Chain(2)
銆€銆€鍏朵腑FMM 鍘熸潗鏂欑敱Hitachi Metals 鎻愪緵, 鍏跺悗鏉愭枡鏈冮€佸埌FMM 鍒朵綔鍟嗚檿鍒朵綔FMM Mask, 骞跺緟鍒朵綔瀹屾垚鍚庨€佷氦鍒扮祩绔鎴舵墜涓娿€�#p#鍒嗛爜妯欓#e#
銆€銆€鎴嚦鍒�2017 骞翠腑鏃偤姝�, Hitachi Metals 鏄偤鏁镐笉澶氳兘鎻愪緵鍘氬害鍦�20 μm 浠ヤ笅銆侀珮鍒嗚鲸鐜�(WQHD)涓斾笉鏈冨彈鍒伴噸鍔涘奖闊跨殑FMM 鍘熸潗鏂欑殑寤犲晢(1)銆�
銆€銆€閲囩敤铦曞埢娉曞埗浣淔MM 鏉挎潗鏅�, 鍏跺熀鏉愮偤FMM Sheet 鍚堥噾, 瑭插悎閲戞潗璩竴鑸偤鍥犵摝鍚堥噾鎴栬秴绱氬洜鐡﹀悎閲�:
銆€銆€• 鍥犵摝鍚堥噾绨＄ū鐐篒NVAR銆備竴鑸現MM 鐢ㄧ殑INVAR 鐐烘槸閹砃i 鍚噺鐐�35.4%宸﹀彸鐨勯惖鍚堥噾(INVAR 36), 涓斿湪-20鈩儈20鈩冧笅鐔辫啫鑴圭郴
銆€銆€鏁稿钩鍧囧€肩偤1.6 × 10-6/鈩冦€� (Table 6)銆�
銆€銆€• 濡傛灉闇€瑕佸埗閫犻珮绮惧害鐨凢MM, 鍓囬渶瑕佹洿楂樼礆鐨処NVAR 鍚堥噾(Super INVAR alloy)銆傜従鍦ㄥ競闈笂鍞竴鑳芥彁渚涙豢瓒矲MM 浣跨敤闇€姹傜殑Super INVAR alloy 鍚堥噾鐨勫粻鍟嗘槸Hitachi Metal (Table 7) 銆�
銆€銆€Hitachi Metals 鎻愪緵鐨勮秴鍥犵摝鍚堥噾鏉�(Super Invar Alloy)鐢㈠搧绶ㄨ櫉鐐篗A-SINVER(6)銆�
銆€銆€瑭插悎閲戞垚鍒嗘瘮渚嬬磩閻�50~70%, 閹�29~40%, 閳�15%浠ヤ笅銆傝垏鍏朵粬鏉愭枡鐩告瘮, Hitachi Metals 鎻愪緵鐨勮秴鍥犵摝鍚堥噾鏉跨殑鐔辫啫鑴圭郴鏁歌定杩戜簬0, 涓旇兘澶犺€愬彈钂搁崓鍒剁▼鐨勯珮婧€屼笉璁婂舰銆�
銆€銆€鍦ˋMOLED 鐢熺敘涓�, Samsung Display 鑸嘓itachi Metal 鏈夋繁搴︾殑鍚堜綔涓旀湁鍙兘灏盨uper INVAR alloy 绨芥湁鎺掍粬鎬у崝璀般€�
Table 6 Hitachi Metal MA-INV 36 鍩烘湰鍙冩暩(6)
Table 7 Hitachi Metal MA-S-INVER 瓒呭洜鐡﹀悎閲戞澘鍩烘湰鍙冩暩(6)
Table 8 Toppan 鐨凢MM 涓昏鍙冩暩(4)
銆€銆€FMM 鎺╂ā鐗堢偤椤ず灞忕敓鐢㈠繀涓嶅彲灏戠殑涓€鍊嬫潗鏂欍€傚湪AMOLED 鐨勭敓鐢腑, FMM 涓昏閬嬬敤浜嶢MOLED 娈礡GB 鏉愭枡鐨勮捀閸嶆墍鐢ㄣ€�
銆€銆€鐢㈢窔涓婁娇鐢‵MM 钂搁崓AMOLED 鏅�, 闄ゅ幓鍦ㄨ純楂樻韩搴︿笅(80鈩冨乏鍙�)閲戝爆褰㈣畩鍜岄噾灞啽鑶ㄨ劰鐨勪笉鍒╁奖闊垮, 闅ㄨ憲FMM 灏哄鐨勮畩澶�, FMM 涓儴浜﹀鏄撶敘鐢熷舰璁�, 灏庤嚧钂搁崓鏉愭枡鐨勯尟浣�, 骞舵渶绲傜敘鐢烢ML 灞ら尟浣嶆贩鑹插拰閲戝爆閬庡瓟鐒℃硶瑕嗚搵绛夌従璞°€�
銆€銆€鍥犵偤鍦ㄧ従闅庢FMM 寰堥洠鍏奸¨澶ч潰绌嶃€佺閲嶉噺銆佷綆鐔辫啫鑴圭郴鏁哥殑瑕佹眰(Table 8)銆�
銆€銆€鍚屾檪FMM 浜︾偤鐢熺敘鑰楁潗銆傚洜鐐鸿捀閸嶆潗鏂欐渻鍦‵MM 涓婃矇绌�, 鎵€浠MM 寰炵悊璜栦笂鑰岃█鏄竴绋槀璨寸殑鏄撹€楀搧銆傚湪鐢㈢窔涓婄敓鐢㈡檪, FMM鍦ㄩ€茶鏁告钂搁崓鍚庨兘闇€瑕侀€茶娓呮礂,
銆€銆€鑰屽悓涓€鍊嬪伐钘濇寰€寰€闇€瑕佸濉奆MM 浣滅偤鍌欑敤涓旂浉浜掕吉娴侀€茶钂搁崓浠ヤ繚璀夌敓鐢㈢殑鏁堢巼銆�
銆€銆€References
銆€銆€1. 鏃ユ湰OLED 閲戝爆閬僵“绔剁埈鎴�”: DNP 铦曞埢閬亣闆婚憚鎶€琛撴寫鎴�, OLEDindustry, April 4th,
銆€銆€2. 闄冲厜姒�, AMOLED 闂滈嵉鎶€琛撹垏FPD 鐢㈡キ閲嶅ぇ璁婇潻, ITRI,
銆€銆€3. Large-size Photomask for Displays, Toppan,
銆€銆€4. Fine Metal Masks for OLED Displays, Toppan,
銆€銆€5. Photomasks, Dai Nippon Printing,
銆€銆€6. Controlled Expansion Alloys, Hitachi Metals MMC Superalloy, Ltd,
銆€銆€7. Dai Nippon Printing to supply FMM masks to BOE Display, OLED-infor, June 20th,
銆€銆€8. The ELVESS OLED Mass Production System, Equipment for Mass Production, Canon Tokki,
銆€銆€9. OLED Fine Metal Mask & OLED Open Mask, 鏃殙鎳夌敤鏉愭枡,
銆€銆€10. 鐬跨珛鎴�, 鍏夋帺妯℃妧琛撳熀绀庛€�
闂滄敞鎴戝€�
鍏溇铏燂細china_tp
寰俊鍚嶇ū锛氫簽濞佽硣瑷�
椤ず琛屾キ闋傜礆鏂板獟楂�
鎺冧竴鎺冨嵆鍙棞娉ㄦ垜鍊�
