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銆€銆€鏈夋檪锛孒yper Jet涓渻鍔犲叆CO2锛屼互澧炲姞UPW鐨勫皫闆绘€э紝閬垮厤楂樺娌栧埛涓嬪湪鐜荤拑鍩烘澘琛ㄩ潰褰㈡垚闈滈浕銆�
銆€銆€MS锛�
銆€銆€Mega Sonic銆傜敱瓒呰伈娉㈤渿瀛愰渿鍕曪紝浣块€氬叆鐨凞IW鐢㈢敓鍚岄牷鐜囬渿鍕曪紝骞跺湪鎺掑垪銆�
銆€銆€楂樺鍓濋洟妯＄祫 1
銆€銆€瑭叉ā濉婁富瑕佸嫊浣滄槸鐢ㄤ簬鎺ュ彈鍓嶅柈鍏冮珮閫熷偝杓搁亷渚嗙殑鍩烘澘锛屼娇鐢ㄥ櫞灏勭殑楂樺鍓濋洟娑插皪鍩烘澘閫茶鍓濋洟铏曠悊锛屽緸瀹屾垚铦曞埢鐨勫熀鏉胯〃闈㈤櫎鍘诲厜闃荤殑妯＄祫銆�
銆€銆€鍏跺悇绲勬垚鍠厓濡備笅锛�
銆€銆€鍓濋洟閫茬▼鍠厓
銆€銆€灏嶇稉閬庨爯婵曡檿鐞嗙殑鍩烘澘锛屽皣鍓濋洟娑插櫞灏勫湪瀹冪殑琛ㄩ潰锛屽緸瀹屾垚铦曞埢鐨勫熀鏉胯〃闈㈤櫎鍘诲厜闃汇€傚湪铏曠悊閬庣▼涓娇鐢ㄥ鍔涘偝鎰熷櫒锛屽鍔涜▓浠ュ強閬庢烤鍣ㄥ皪鍓濋洟娑茬殑绱斿害锛屽鍔涢€茶鎺у埗銆�
銆€銆€婧害鎺у埗鍠厓
銆€銆€灏嶅墲闆㈡恫鐨勬韩搴﹂€茶鎺у埗锛屾韩搴﹁寖鍦嶇偤60~80鈩冿紝婧樊鎺у埗鍦�3鈩冦€�
銆€銆€鍌宠几鍠厓
銆€銆€鎺ュ彈鍓嶉亾宸ュ簭鍌宠几閬庝締鐨勫熀鏉匡紝鍦ㄥ墲闆㈤亷绋嬩腑灏嶅熀鏉块€茶鍌宠几铏曠悊锛屽湪鍓濋洟瀹屾垚鍚庯紝灏囧叾鍌宠几鍒颁笅涓€鍠厓銆備娇鐢ㄥ偝杓歌讥杌革紝涓枔杓ヨ桓鍜岄爞閮ㄨ讥杌搁€茶鍌宠几锛屼娇鐢ㄥ伌鍚戝皫鍚戣讥杌搁€茶鎺掑垪鎺у埗銆�
銆€銆€杓斿姪鍠厓
銆€銆€灏嶅墲闆㈠伐搴忔彁渚涙亽婧殑鍓濋洟娑诧紝绌烘埃绱旀按銆�
銆€銆€楂樺鍓濋洟妯＄祫 2
銆€銆€瑭叉ā濉婁富瑕佸嫊浣滄槸鐢ㄤ簬鎺ュ彈鍓嶅柈鍏冮珮閫熷偝杓搁亷渚嗙殑鍩烘澘锛屼娇鐢ㄥ櫞灏勭殑楂樺鍓濋洟娑插皪鍩烘澘閫茶鍓濋洟铏曠悊锛屽緸瀹屾垚铦曞埢鐨勫熀鏉胯〃闈㈤櫎鍘诲厜闃荤殑妯＄祫銆傛惉閬嬭讥杌镐笂閮ㄨō鏈夐珮澹撳櫞灏勫槾銆傚彟澶栵紝閭勮ō鏈夋竻娲椾笂灞忕僵鐨勫収鍋寸殑绱旀按鍣村皠鍢淬€�
銆€銆€鍏剁祫鎴愬柈鍏冭垏楂樺鍓濋洟妯＄祫1鍠厓鐩稿悓銆�
銆€銆€鍣村皠鍓濋洟妯＄祫(spray strip module)
銆€銆€鍦ㄦ帴鍙楀埌渚嗚嚜楂樺鍣村皠鍓濋洟妯＄祫2鐨勫熀鏉垮悗锛岃┎妯＄祫瀹屾垚鐨勪富瑕佸嫊浣滄槸寰炶ō缃湪鎼亱杓ヨ桓涓婁笅鐨勫櫞灏勫槾鍚戝熀鏉挎銆佸弽闈㈠櫞灏勫墲闆㈡恫銆傚墲闆㈡恫寰炶ō鍦ㄦā绲勪笅閮ㄧ殑缃愰€氶亷寰挵娉甸€佸叆鍣村皠鍢达紝浣跨敤閬庣殑铏曠悊娑插啀娆″洖鏀跺埌缃愪腑銆傚叾绲勬垚閮ㄥ垎濡備笅锛�
銆€銆€閫茬▼鍠厓
銆€銆€涓昏鍕曚綔鏄緸瑷疆鍦ㄦ惉閬嬭讥杌镐笂涓嬬殑鍣村皠鍢村悜鍩烘澘琛ㄣ€佽儗闈㈠櫞灏勫墲闆㈡恫銆傚墲闆㈡恫寰炶ō鍦ㄦā绲勪笅閮ㄧ殑缃愰€氶亷寰挵娉甸€佸叆鍣村皠鍢达紝浣跨敤閬庣殑铏曠悊娑插啀娆″洖鏀跺埌缃愪腑銆�
銆€銆€婧害鎺у埗鍠厓
銆€銆€涓昏鍕曚綔鏄皪鍓濋洟娑茬殑婧害閫茶鎺у埗锛屾韩搴﹁寖鍦嶇偤60~80鈩�
銆€銆€鍌宠几鍠厓
銆€銆€涓昏鍕曚綔鏄帴鍙楀墠閬撳伐搴忓偝杓搁亷渚嗙殑鍩烘澘锛屽湪鍓濋洟閬庣▼涓皪鍩烘澘閫茶鍌宠几铏曠悊锛屽湪鍓濋洟瀹屾垚鍚庯紝灏囧叾鍌宠几鍒颁笅涓€鍠厓銆備娇鐢ㄥ偝杓歌讥杌革紝涓枔杓ヨ桓鍜岄爞閮ㄨ讥杌搁€茶鍌宠几锛屼娇鐢ㄥ伌鍚戝皫鍚戣讥杌搁€茶鎺掑垪鎺у埗銆�
銆€銆€杓斿姪鍠厓
銆€銆€瑭插柈鍏冪殑涓昏鍕曚綔鏄皪鍓濋洟宸ュ簭鎻愪緵鎭掓韩鐨勫墲闆㈡恫锛岀┖姘ｇ磾姘淬€�
銆€銆€鍨嬫按娲楁ā绲�(U-turn conveyor module)
銆€銆€鏈柈鍏冩槸涓€鍊嬫按娲楀姛鑳界殑U鍨嬫惉閬嬭粚閬撱€傚湪鎺ユ敹鍋淬€佽几閫佸伌浠ュ強姘村钩鎼亱閮ㄧ殑涓婁笅闈紙姘村钩鎼亱閮ㄥ彧鏈変笂闈級瀹夎鏈夊櫞鍢达紝涓€閭婃惉閬嬪熀鏉夸竴閭婂櫞鍑虹磾姘淬€備笅閮ㄨ鏈夌綈锛岄€氶亷寰挵娉电殑澹撳姏鍚戝櫞鍢磋几閫佹恫楂斻€傞€氶亷涓€绯诲垪姘存礂閬庣▼鍘婚櫎娈樼暀鐨勫墲闆㈡恫銆傚悓鏅備娇鐢ㄨ讥杌哥殑鎶崌鑸囦笅闄嶈檿鐞嗭紝瀹屾垚鍩烘澘鐨刄鍨嬭綁褰庡嫊浣溿€�
銆€銆€姘存礂妯＄祫鐨勭祫鎴愰儴鍒嗗涓嬶細
銆€銆€鍌宠几鍠厓
銆€銆€寰炰笂涓€妯＄祫鎺ユ敹鎼亱渚嗙殑鍩烘澘锛屽熀鏉块€佸叆閬庣▼涓敤鍏ュ彛娑查珨鍒€閫茶姘存礂铏曠悊銆傚偝杓稿鏋滈噰鐢ㄥ偩鏂滃Э鍕紝鍓囧彲浠ユ彁鍗囨竻娲楁晥鏋滐紝闄嶄綆姘翠娇鐢ㄩ噺銆�
銆€銆€鎻愬崌杞夋彌杓ヨ桓骞舵姮鍗囧熀鏉匡紙閫欐檪閫佸嚭鍋寸殑杞夋彌杓ヨ桓涓婂崌锛夈€�
銆€銆€鏃嬭綁杞夋彌杓ヨ桓鍜屾按骞虫惉閬嬮儴鐨勬惉閬嬭讥杌革紝灏囧熀鏉挎惉閬嬪埌閫佸嚭鍋淬€傛惉閬嬫檪锛岄€茶鍣存礂铏曠悊銆�
銆€銆€闄嶄笅閫佸嚭鍋寸殑杞夋彌杓ヨ桓锛屽皣鍩烘澘鏀惧埌鍌炬枩鏂瑰紡鎼亱杓ヨ桓涓娿€�
銆€銆€鏃嬭綁閫佸嚭鍋寸殑鎼亱杓ヨ桓锛屽皣鍩烘澘鎼亱鍒颁笅涓€妯＄祫銆傛惉閬嬮亷绋嬩腑锛岄€茶鍣存礂
銆€銆€閫茬▼鍠厓
銆€銆€鍦ㄦ帴鏀跺伌銆佽几閫佸伌浠ュ強姘村钩鎼亱閮ㄧ殑涓婁笅闈紙姘村钩鎼亱閮ㄥ彧鏈変笂闈級瀹夎鏈夊櫞鍢达紝涓€閭婃惉閬嬪熀鏉夸竴閭婂櫞鍑虹磾姘淬€備笅閮ㄨ鏈夌綈锛岄€氶亷寰挵娉电殑澹撳姏鍚戝櫞鍢磋几閫佹恫楂斻€傞€氶亷涓€绯诲垪姘存礂閬庣▼鍘婚櫎娈樼暀鐨勫墲闆㈡恫銆� 3) 杓斿姪鍠厓
銆€銆€瑭插柈鍏冪殑涓昏鍕曚綔鏄皪U-Turn娓呮礂宸ュ簭鎻愪緵鎭掓韩绌烘埃锛岀磾姘淬€�
銆€銆€鐩存按娲楁ā绲�(High Pressure/AAJET Rinse Module)
銆€銆€瑭叉ā绲勪富瑕佸嫊浣滄槸灏嶅畬鎴愬墲闆綔鐢ㄧ殑鍩烘澘閫茶姘存礂锛屽幓铏曞墲闆㈡恫鐨勬畼鐣欍€�
銆€銆€鍏朵富瑕佸柈鍏冪祼妲嬪涓嬶細
銆€銆€閫茬▼鍠厓
銆€銆€鍦ㄧ浉灏嶄簬闆昏矾鏉胯閫叉柟鍚戯紝涓婃父鍋寸敱寰挵姘存礂閮ㄣ€佷笅娓稿伌鐢辩洿姘存礂閮ㄧ祫鎴愩€傛ā绲勭殑涓嬮儴瀹夎浜嗙綈锛岀綈鐨勬按娲楁按閫氶亷寰挵娉电殑澹撳姏閫佸埌寰挵姘存礂閮ㄧ殑鍣村槾銆備娇鐢ㄥ悗鐨勬恫楂斿啀鍥炲埌缃愩€傜洿姘存礂閮ㄥ皣宸ュ粻鐩存帴渚涙噳鐨勭磾姘撮€氶亷涓婁笅鐨勫櫞鍢村櫞鍑猴紝灏嶅熀鏉块€茶娓呮礂銆�
銆€銆€鍌宠几鍠厓
銆€銆€涓昏鍕曚綔鏄帴鍙楀墠閬撳伐搴忓偝杓搁亷渚嗙殑鍩烘澘锛屽湪娓呮礂閬庣▼涓皪鍩烘澘閫茶鍌宠几铏曠悊锛屽湪娓呮礂瀹屾垚鍚庯紝灏囧叾鍌宠几鍒颁笅涓€鍠厓銆備娇鐢ㄥ偝杓歌讥杌革紝涓枔杓ヨ桓鍜岄爞閮ㄨ讥杌搁€茶鍌宠几锛屼娇鐢ㄥ伌鍚戝皫鍚戣讥杌搁€茶鎺掑垪鎺у埗銆�
銆€銆€杓斿姪鍠厓
銆€銆€鐐洪€茬▼鍠厓鎻愪緵寰挵绱旀按浠ュ強灏嶆按娲楃敤鐨勫鍔涢€茶鎺у埗鍜岃绡€銆�
銆€銆€骞茬嚗妯＄祫(Air knife module)
銆€銆€瑭叉ā绲勭殑涓昏宸ヤ綔鏄共鐕ユ按娲楀悗鐨勯浕璺澘銆傚緸姘ｅ垁鍚戦浕璺澘鐨勬鍙嶉潰鍚瑰嚭骞茬嚗绌烘埃闄ゅ幓姘村垎閫茶骞茬嚗銆備笂涓嬪悇瀹夎浜嗕竴鑷哄惞鍑哄共鐕ョ┖姘ｇ殑瑁傜斧寮忔埃鍒€銆�
銆€銆€涓€ф惉閬嬭粚閬撴ā绲�(Neutral conveyor module)
銆€銆€瑭叉ā绲勭殑涓昏鍕曚綔鏄湪鍠厓鑸囧柈鍏冧箣闁撳畬鎴愮殑鎼亱锛屾槸灏囧緸鍓嶄竴妯＄祫鎼亱閬庝締鐨勫熀鏉跨洿鎺ユ惉閬嬪埌涓嬩竴妯＄祫鐨勬惉閬嬭粚閬撱€�#p#鍒嗛爜妯欓#e#
銆€銆€杓稿嚭妯＄祫(Exit conveyor module)
銆€銆€杓稿嚭妯＄祫浣嶄簬鍚勫柈鍏冨悗閮ㄥ苟鍚戜笅涓€鍠厓閬嬮€佸熀鏉跨殑妯＄祫銆傚嚭鍙ｆ惉閬嬭粚閬撴ā绲勪互鍌炬枩鏂瑰紡鎼亱鑰屼締鐨勫熀鏉胯綁鎻涚偤姘村钩鏂瑰紡鍚庡緟姗熴€傜敱涓嬫父鐨凪HU鐨勬姊拌噦鍙栧嚭鍦ㄨ┎浣嶇疆鐨勫熀鏉裤€�
銆€銆€渚涙恫妯＄祫(Supply tank module)
銆€銆€瑭叉ā绲勪富瑕佹槸瀹屾垚灏嶈劔鑶滅敤鐨勮棩娑查€茶鍔犵啽铏曠悊锛屽苟灏囪棩娑插偝杓稿埌鍚勫墲闆㈠柈鍏冦€�
銆€銆€铦�(婵�)鍒�)瑷倷妲嬫垚鍜屾€ц兘鎸囨
銆€銆€铦�(婵�)鍒�)瑷倷鐨勭祫鎴�
銆€銆€IN CV UNIT
銆€銆€EUV UNIT
銆€銆€NEUTRAL UNIT
銆€銆€ETCH UNIT1,2,3 UNIT
銆€銆€TANK UNIT
銆€銆€RINSE UNIT(SWR1,2,3,4 &F/R)
銆€銆€A/K UNIT
銆€銆€DRY UNIT1,2
銆€銆€OUT CV UNIT
銆€銆€铦�(婵�)鍒�)瑷倷鐨勬€ц兘鎸囨
銆€銆€IN CV UNIT:
銆€銆€涓昏浣滅敤鏄緸Robot涓婃帴鏀跺熀鏉裤€�
銆€銆€鐣跺熀鏉垮緸Robot鍙夊瓙涓婃斁缃埌IN CV鍏ф惉閫佺窔涓�,Sensor妾㈡脯鍒板悗锛屾姊版墜閫€鍑恒€傞€氶亷Alignment姗熸灏囧熀鏉胯鏁村埌Passline鐨勪綅缃紝鍐嶉€氶亷鎼€佺窔閫佸叆涓嬩竴鍠厓銆�
銆€銆€闇€瑕佹敞鎰廇lignment姗熸鐨勫嫊浣滃钩绌�,閫熷害鍧囧嫽,鐒℃矕鎿婄従璞�.
銆€銆€閫佸嚭瀹岀暍鍚庡啀鍚慠obot鐧煎嚭閫佸叆瑕佹眰锛岄€茶涓嬩竴鐗囧熀鏉跨殑鎺ユ敹宸ヤ綔銆�
銆€銆€EUV UNIT锛�
銆€銆€涓昏閫氶亷UV Lamp鐓у皠锛屽幓闄ゅ熀鏉胯〃闈㈢殑鏈夋鐗┿€�
銆€銆€NEUTRAL UNIT锛�
銆€銆€瑭插柈鍏冭捣鍒伴亷娓′綔鐢ㄣ€�
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